COMSOL (Laser Heating of a Silicon Wafer)

A silicon wafer is heated up by a laser that moves radially in and out over time while the wafer itself rotates on its stage.
Modeling the incident heat flux from the laser as a spatially distributed heat source on the surface, the transient thermal response of the wafer is obtained.
The average, maximum, and minimum temperatures, as well as the peak temperature difference across the wafer, are stored at every calculation step. The temperature distribution across the entire wafer is stored at a specified number of output time steps.

Word file containing the variables and parameters:

https://drive.google.com/drive/folders/1K8Gxl3wxqgMT3nC3m1OFLGGXVfQoYDx1?usp=sharing

#comsol #cae #semiconductor